Merit Sensor HM Series

Merit Sensor HM Series

The HM series harsh media pressure MEMS sensing elements from Merit SensorTM is ideal for low and medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The HM series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

  • Broad pressure MEMS sensing elements
  • Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
  • Absolute pressurised from the cavity side or gauge pressurised from either side of the diaphragm
  • Operating temperature −40°C to +150°C
  • Typical full scale output (at 5V excitation) 75mV at 15psi, 150mV at 100psi, 135mV at 300psi and 175mV at 500psi
  • Impedance of 5kΩ (typical) or 3.5kΩ (optional)
  • Suitable for air, gases and liquids that are compatible with silicon and glass
  • Sawn wafer on tape in metal frame or die in waffle pack
  • Bridge options of closed or closed with temperature diode
  • AEC-Q100 qualified

Typical applications for the Merit SensorTM HM series include:

  • Industrial
  • Aerospace
  • Automotive
  • Medical
  • Please see below the specifications for the Merit SensorTM HM series:

    Merit Sensor<sup>TM</sup> HM series Specifications
Specifications
Additional FeaturesHarsh media low and medium pressure MEMS sensing elements suitable for air, gases and liquids that are compatible with silicon and glass. Bridge options of closed or closed with temperature diode
Impedance5kΩ typical
3.5kΩ optional
Operating Temperature−40°C to +150°C
OutputTypical full scale at 5V excitation
75mV at 15psi
150mV at 100psi
135mV at 300psi
175mV at 500psi
Package/SizeSawn wafer on tape in metal frame
Die in waffle pack
Pressure Range15psi
100psi
300psi
500psi
Pressure TypeAbsolute pressurised from cavity side
Gauge pressurised from either side of the diaphragm

We are pleased to provide you with a range of additional content including product datasheets and application notes for your reference. Please see below for the latest content available:

 

 

DOCUMENTATION
PDF DocumentMerit Sensor HM series harsh media pressure MEMS sensing elements datasheet
PDF DocumentMerit Sensor bridge configuration options application note
PDF DocumentMerit Sensor handling and mounting of pressure die application note
PDF DocumentMerit Sensor reflow soldering application note
PDF DocumentMerit Sensor product selection guide

Below is an example of the part number break down for the HM series:

bp Series Part Number Example

This product is available fully compliant to the RoHS EU directive 2011/65/EU.

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  • Product Code: Merit Sensor HM Series
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Tags: Merit HM, HM, Merit, Merit Sensor,