0.5mm Gauge series

  • Merit Sensor
  • Low pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of half open and closed available
  • Parts supplied as sawn wafer on tape in metal frame
  • Merit Sensor
  • Precision MEMS silicon pressure sensor die
  • Pressure ranges of 5 to 300psi / 0.34 to 21 bar
  • Pressure type of absolute or gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 60mV to 180mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media