• Merit Sensor

Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

Merit Sensor J Series

  • Low pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of half open and closed available
  • Parts supplied as sawn wafer on tape in metal frame
  • Exempt

The J series low pressure MEMS pressure sensing elements from Merit SensorTM is ideal for OEM applications, offering available pressure ranges of between 1psi and 300psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of โˆ’40ยฐC to +150ยฐC and a full scale output range of 120mV (depending on the pressure range). The J series from Merit SensorTM products incorporate a proprietary Sentiumยฎ technology, developed to provide a best-in-class operating temperature range and superior stability.

  • Low pressure MEMS sensing elements
  • Pressure ranges available 3psi, 5psi, 15psi, 30psi, 50psi, 100psi 150psi and 300psi
  • 0.5mm, 0.89mm, 1.5mm gauge or 1.5mm absolute options available
  • Temperature range โˆ’40ยฐC to +150ยฐC
  • Typical full scale output (at 1.5mA / 7.5V excitation) 120mV, 40mV at 1psi
  • Impedance of 5kฮฉ (typical) or 3.5kฮฉ (optional)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame
  • Bridge options of half open and closed

 

Typical applications for the Merit SensorTM J series include:

    • Industrial
    • Low level monitoring
    • Clean rooms
    • building automation
    • HVAC, airflow

 

Please see below the specifications for the Merit SensorTM J series:

Merit Sensor J series Specifications

Merit Sensor Systems, Inc. partners with Rhopoint and itโ€™s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visitย https://meritsensor.com/ย for more information.

Specifications

Weight 0.00000 kg
Dimensions 0.90 x 1.95 x 1.95mm
Bridge

1/2 Open, Closed

Impedance

3.5kฮฉ, 5kฮฉ

Layout

C, K, N/A

Output

120mV

Mounting / Size

Pressure Range

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Pressure Type

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Series / Model

Temperature Range

-40 to +150ยฐC

Product Type

Merit Sensor J Series Ordering Info

Below is an example of the part number break down for the J series:

bp Series Part Number Example

Due to the technical complexity nature of these components, complete specifications, performance data, dimensional information and configuration options are provided within the product datasheet.

Merit Sensor J Series Ordering Info

Below is an example of the part number break down for the J series:

bp Series Part Number Example

Merit Sensor J Series Technical Library

We are pleased to provide you with a range of additional content including product datasheets and application notes for your reference. Please see below for the latest content available:

 

 

DOCUMENTATION
Merit Sensor J series low pressure MEMS sensing elements datasheet
Merit Sensor bridge configuration options application note
Merit Sensor handling and mounting of pressure die application note
Merit Sensor reflow soldering application note
Merit Sensor product selection guide

Resources

Supporting Manufacturer Information

Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

Merit Sensor J Series