MEMS Silicon Dies

Merit Sensor 7000 Series

Broad Pressure MEMS Silicon Piezoresistive Pressure Sensor
  • High-volume, medium-pressure sensing elements
  • Pressure ranges available 15psi, 50psi, 100psi, 300psi & 500psi
  • Absolute or Gauge options available
  • Temperature range −40°C to +150°C
  • Full scale outputs from 60mV to 210mV (at 5V excitation)
  • Impedance of 5kΩ (typical) or 3.5kΩ±0.5kΩ (optional)
  • Suitable for clean, dry air and non-corrosive gases media

Merit Sensor HM Series

Harsh Media MEMS Silicon Piezoresistive Pressure Sensor
  • Harsh media low and medium pressure MEMS sensing element
  • Suitable for air, gases and liquids that are compatible with silicon and glass
  • Bridge options of closed or closed with temperature diode available
  • Parts supplied as sawn wafer on tape in metal frame or die in waffle pack

Merit Sensor J Series

Low Pressure MEMS Silicon Piezoresistive Pressure Sensor
  • Low pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of half open and closed available
  • Parts supplied as sawn wafer on tape in metal frame

Talk to an Engineer

Get help specifying or customising the right product for your application.

Merit Sensor L Series

Ultra-Low Pressure MEMS Silicon Piezoresistive Pressure Sensor
  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Suitable for clean, dry air and non-corrosive gases media

Merit Sensor S Series

Accurate & Stable Pressure MEMS Silicon Piezoresistive Pressure Sensor
  • Precision MEMS silicon pressure sensor die
  • Pressure ranges of 5 to 300psi / 0.34 to 21 bar
  • Pressure type of absolute or gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 60mV to 180mV (at 5V excitation)
  • Suitable for clean, dry air and non-corrosive gases media

Custom Component Solutions

Working alongside your design team from the earliest stage, we help you select the right part for the application and, where a standard part will not do, develop customised components with our manufacturing partners such as lead length, termination and package size.

Related Components

Manufacturers

Looking for MEMS Silicon Dies?

The below manufacturers are all of our authorised partners that produce MEMS Silicon Dies or related products.

MEMS Silicon Dies

We offer MEMS silicon dies in various sizes and sensitivities as well as different pressure types, such as absolute and gauge/gage.