Merit Sensor 7000 Series

Description

The 7000 series broad pressure MEMS sensing elements from Merit Sensor^TM is ideal for broad medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The 7000 series from Merit Sensor^TM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

• Broad pressure MEMS sensing elements
• Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
• Absolute or gauge options available
• Temperature range −40°C to +150°C
• Typical full scale output (at 5V excitation) 75mV at 15psi, 125mV at 50psi, 150mV at 100psi and 300psi, 175mV at 500psi
• Impedance of 5kΩ (typical) or 3.5kΩ (optional)
• Suitable for clean, dry air and non-corrosive gases media
• Sawn wafer on tape in metal frame
• Bridge options of open, half open or closed
• AEC-Q100 qualification available upon request

Typical applications for the Merit Sensor^TM 7000 series include:

• Industrial
• Aerospace
• Automotive
• Consumer
• Medical

Please see below the specifications for the Merit Sensor^TM 7000 series: