Description
The 7000 series broad pressure MEMS sensing elements from Merit SensorTM is ideal for broad medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The 7000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.
- Broad pressure MEMS sensing elements
- Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
- Absolute or gauge options available
- Operating temperature −40°C to +150°C
- Typical full scale output (at 5V excitation) 75mV at 15psi, 125mV at 50psi, 150mV at 100psi and 300psi, 175mV at 500psi
- Impedance of 5kΩ (typical) or 3.5kΩ (optional)
- Suitable for clean, dry air and non-corrosive gases media
- Sawn wafer on tape in metal frame
- Bridge options of open, half open or closed
- AEC-Q100 qualification available upon request
Typical applications for the Merit SensorTM 7000 series include:
- Industrial
- Aerospace
- Automotive
- Consumer
- Medical
Please see below the specifications for the Merit SensorTM 7000 series:
