Merit Sensor HM Series

  • Merit Sensor

Product Features

  • Harsh media low and medium pressure MEMS sensing element
  • Suitable for air, gases and liquids that are compatible with silicon and glass
  • Bridge options of closed or closed with temperature diode available
  • Parts supplied as sawn wafer on tape in metal frame or die in waffle pack
  • Automotive

Applications

  • Exempt

The HM series harsh media pressure MEMS sensing elements from Merit SensorTM is ideal for low and medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The HM series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

  • Broad pressure MEMS sensing elements
  • Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
  • Absolute pressurised from the cavity side or gauge pressurised from either side of the diaphragm
  • Temperature range −40°C to +150°C
  • Typical full scale output (at 5V excitation) 75mV at 15psi, 150mV at 100psi, 135mV at 300psi and 175mV at 500psi
  • Impedance of 5kΩ (typical) or 3.5kΩ (optional)
  • Suitable for air, gases and liquids that are compatible with silicon and glass
  • Sawn wafer on tape in metal frame or die in waffle pack
  • Bridge options of closed or closed with temperature diode
  • AEC-Q100 qualified

Typical applications for the Merit SensorTM HM series include:

  • Industrial
  • Aerospace
  • Automotive
  • Medical

Please see below the specifications for the Merit SensorTM HM series:

Merit Sensor HM series Specifications