Merit Sensor L Series

  • Merit Sensor

Product Features

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media

Applications

The L series silicon MEMS piezoresistive pressure sensor from Merit SensorTM is ideal for ultra-low pressure applications, offering pressure ranges from 0.15 to 1psi (1 to 6.89 kPa 10 to 68.95 mbar). The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. Merit Sensor products incorporate a proprietary Sentium® technology, developed to provide an exceptional operating temperature range of -40°C to +150°C while still achieving superior stability. The L Series offers full-scale output ranges from 30mV to 60mv (at 5V excitation, depending on the pressure range) with additional outputs being available upon request.

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge (R)
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame (T)
  • Bridge options of open or closed
  • U.S. Patent Number 7,290,453

Typical applications for the Merit SensorTM L series include:

  • Air/Non-aggressive gases pressure/differential
  • High-performance oil-filled transducers
  • High-performance backside packaged modules
  • Low-level monitoring
  • Clean rooms, Building automation, HVAC, Airflow
  • Oil, Gas, Fuel, A/C gases & Water



Merit Sensor Systems, Inc. partners with Rhopoint and it’s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visit https://meritsensor.com/ for more information.

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Specifications

Dimensions 1.28 x 3.28 x 3.28mm
Bridge

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Excitation

Impedance

Output

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Package / Size

Pressure Range

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Pressure Type

Product Type

Series / Model

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Temperature Range (°C)

Merit Sensor L Series Ordering Info

Below is the model number configuration for the L series from Merit Sensor.

Ordering example: L1O-50K-RT
LXXXXXXT

(L)

Impedance (X)

7
5kΩ

Bridge (X)

C
Closed
O
Open

Pressure Range (XXX)

10k
1 psi
30k
0.3 psi
50k
0.15 psi

Pressure Type (X)

9
Gauge

(T)

Sawn wafer on tape in metal frame

Merit Sensor L Series Resources

Product Datasheet

Supporting Manufacturer Information

  • Merit Sensor
Merit Sensor L Series

Merit Sensor L Series

Please be advised that due to the ongoing supply issues with raw materials affecting the global electronics industry, as well as an increase in orders received by our manufacturing partners, a large number of products are facing increased lead times in recent months. For the latest lead time and stock availability, please contact one of our engineers who will be happy to discuss lead times further and the potential for alternative parts.