Merit Sensor L Series

Ultra-Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

Merit Sensor L Series

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Suitable for clean, dry air and non-corrosive gases media
  • Merit Sensor
  • Compliant

Specifications

Dimensions 1.28 x 3.28 x 3.28mm
Bridge

Open, Closed

Excitation

5V (typical)

Impedance

5kΩ

Output

30mV, 36mV, 37.5mV, 40mV, 45mV, 50mV, 54mV, 60mV

Mounting / Size

Pressure Range

, ,

Pressure Type

Product Type

Series / Model

,

Temperature Range

-40 to +150°C

Merit Sensor L Series

Ultra-Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

Merit Sensor L Series

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Suitable for clean, dry air and non-corrosive gases media
  • Merit Sensor
  • Compliant

Request a Quote

Product Datasheet

Supporting Manufacturer Information

Talk to our engineering team

Get help specifying or customising the right product for your application.

Related PCB Mountable Pressure Sensors items

Merit Sensor - 7000 Series
Merit Sensor 7000 Series
Merit Sensor HM Series
Merit Sensor J Series

Custom Component Solutions

Working alongside your design team from the earliest stage, we help you select the right part for the application and, where a standard part will not do, develop customised components with our manufacturing partners such as lead length, termination and package size.

Related Merit Sensor L Series Components

The L series silicon MEMS piezoresistive pressure sensor from Merit SensorTM is ideal for ultra-low pressure applications, offering pressure ranges from 0.15 to 1psi (1 to 6.89 kPa 10 to 68.95 mbar). The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. Merit Sensor products incorporate a proprietary Sentium® technology, developed to provide an exceptional operating temperature range of -40°C to +150°C while still achieving superior stability. The L Series offers full-scale output ranges from 30mV to 60mv (at 5V excitation, depending on the pressure range) with additional outputs being available upon request.

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge (R)
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame (T)
  • Bridge options of open or closed
  • U.S. Patent Number 7,290,453

Typical applications for the Merit SensorTM L series include:

  • Air/Non-aggressive gases pressure/differential
  • High-performance oil-filled transducers
  • High-performance backside packaged modules
  • Low-level monitoring
  • Clean rooms, Building automation, HVAC, Airflow
  • Oil, Gas, Fuel, A/C gases & Water

Merit Sensor Systems, Inc. partners with Rhopoint and it’s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visit https://meritsensor.com/ for more information.

Merit Sensor L Series

Ultra-Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

Merit Sensor L Series