Merit Sensor L Series

  • Merit Sensor

Product Features

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media

Applications

The L series silicon MEMS piezoresistive pressure sensor from Merit SensorTM is ideal for ultra-low pressure applications, offering pressure ranges from 0.15 to 1psi (1 to 6.89 kPa 10 to 68.95 mbar). The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. Merit Sensor products incorporate a proprietary Sentium® technology, developed to provide an exceptional operating temperature range of -40°C to +150°C while still achieving superior stability. The L Series offers full-scale output ranges from 30mV to 60mv (at 5V excitation, depending on the pressure range) with additional outputs being available upon request.

  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge (R)
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame (T)
  • Bridge options of open or closed
  • U.S. Patent Number 7,290,453

Typical applications for the Merit SensorTM L series include:

  • Air/Non-aggressive gases pressure/differential
  • High-performance oil-filled transducers
  • High-performance backside packaged modules
  • Low-level monitoring
  • Clean rooms, Building automation, HVAC, Airflow
  • Oil, Gas, Fuel, A/C gases & Water



Merit Sensor Systems, Inc. partners with Rhopoint and it’s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visit https://meritsensor.com/ for more information.

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Specifications

Dimensions 1.28 x 3.28 x 3.28mm
Bridge

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Excitation

Impedance

Output

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Package / Size

Pressure Range

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Pressure Type

Product Type

Series / Model

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Temperature Range (°C)

Merit Sensor L Series Ordering Info

Below is the model number configuration for the L series from Merit Sensor.

Ordering example: L1O-50K-RT
LXXXXXXT

(L)

Impedance (X)

7
5kΩ

Bridge (X)

C
Closed
O
Open

Pressure Range (XXX)

10k
1 psi
30k
0.3 psi
50k
0.15 psi

Pressure Type (X)

9
Gauge

(T)

Sawn wafer on tape in metal frame

Merit Sensor L Series Resources

Product Datasheet

Supporting Manufacturer Information

  • Merit Sensor
Merit Sensor L Series

Merit Sensor L Series