Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

The J series low pressure MEMS pressure sensing elements from Merit Sensor^TM is ideal for OEM applications, offering available pressure ranges of between 1psi and 300psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range of 120mV (depending on the pressure range). The J series from Merit Sensor^TM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

• Low pressure MEMS sensing elements
• Pressure ranges available 3psi, 5psi, 15psi, 30psi, 50psi, 100psi 150psi and 300psi
• 0.5mm, 0.89mm, 1.5mm gauge or 1.5mm absolute options available
• Temperature range −40°C to +150°C
• Typical full scale output (at 1.5mA / 7.5V excitation) 120mV, 40mV at 1psi
• Impedance of 5kΩ (typical) or 3.5kΩ (optional)
• Suitable for clean, dry air and non-corrosive gases media
• Sawn wafer on tape in metal frame
• Bridge options of half open and closed

Typical applications for the Merit Sensor^TM J series include:

• • Industrial
  • Low level monitoring
  • Clean rooms
  • building automation
  • HVAC, airflow

Please see below the specifications for the Merit Sensor^TM J series:

Merit Sensor Systems, Inc. partners with Rhopoint and it’s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visit https://meritsensor.com/ for more information.