Merit Sensor 3000 Series

Merit Sensor 3000 Series

The 3000 series low pressure MEMS pressure sensing elements from Merit SensorTM  is ideal for OEM applications, offering available pressure ranges of between 5psi and 100psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV to 150mV (depending on the pressure range). The 3000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

  • Low pressure MEMS sensing elements
  • Pressure ranges available 5psi, 15psi, 30psi, 50psi and 100psi
  • Absolute and gauge options available
  • Operating temperature −40°C to +150°C
  • Typical full scale output (at 5V excitation) 75mV at 5psi, 125mV at 100psi, 150mV at 15psi, 30psi and 100psi
  • Impedance of 5kΩ (typical) or 3.5kΩ (optional)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame
  • Bridge options of open, half open and closed

Typical applications for the Merit SensorTM 3000 series include:

  • Industrial
  • Calibration devices
  • Pressure meters
  • Please see below the specifications for the Merit SensorTM 3000 series:

    Merit Sensor<sup>TM</sup> 3000 series Specifications
Additional Features
  • Low pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of open, half closed and closed available
  • Parts supplied in wafers on tape or waffle pack
  • 5kΩ typical
  • 3.5kΩ optional
Operating Temperature −40°C to +150°C
Output Typical full scale at 5V excitation:
  • 75mV at 5psi
  • 125mV at 100psi
  • 150mV at 15psi, 30psi and 100psi
Package/Size Surface-mount
Pressure Range
  • 5psi
  • 15psi
  • 30psi
  • 50psi
  • 100psi
Pressure Type
  • Absolute
  • Gauge

We are pleased to provide you with a range of additional content including product datasheets and application notes for your reference. Please see below for the latest content available:



PDF Document Merit Sensor 3000 series MEMS pressure sensing elements datasheet
PDF Document Merit Sensor bridge configuration options application note
PDF Document Merit Sensor handling and mounting of pressure die application note
PDF Document Merit Sensor reflow soldering application note
PDF Document Merit Sensor product selection guide

Below is an example of the part number break down for the 3000 series:

bp Series Part Number Example

This product is available fully compliant to the RoHS EU directive 2011/65/EU.

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  • Product Code: Merit Sensor 3000 Series
  • SKU: Merit Sensor 3000 Series
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Tags: Merit 3000, 3000, Merit, Merit Sensor, 3SO-3000-6T, 3SO-2000-6T, 3SO-1000-6T, 3SO-0500-6T, 3SO-0300-6T, 3SO-3000-CT, 3SO-2000-CT, 3SO-1000-CT, 3SO-0500-CT, 3SO-0300-CT, 3SH-3000-6T, 3SH-2000-6T, 3SH-1000-6T, 3SH-0500-6T, 3SH-0300-6T, 3SH-3000-CT, 3SH-2000-CT, 3SH-1000-CT, 3SH-0500-CT, 3SH-0300-CT, 3SC-3000-6T, 3SC-2000-6T, 3SC-1000-6T, 3SC-0500-6T, 3SC-0300-6T, 3SC-3000-CT, 3SC-2000-CT, 3SC-1000-CT, 3SC-0500-CT, 3SC-0300-CT, 4SO-3000-6T, 4SO-2000-6T, 4SO-1000-6T, 4SO-0500-6T, 4SO-0300-6T, 4SO-3000-CT, 4SO-2000-CT, 4SO-1000-CT, 4SO-0500-CT, 4SO-0300-CT, 4SH-3000-6T, 4SH-2000-6T, 4SH-1000-6T, 4SH-0500-6T, 4SH-0300-6T, 4SH-3000-CT, 4SH-2000-CT, 4SH-1000-CT, 4SH-0500-CT, 4SH-0300-CT, 4SC-3000-6T, 4SC-2000-6T, 4SC-1000-6T, 4SC-0500-6T, 4SC-0300-6T, 4SC-3000-CT, 4SC-2000-CT, 4SC-1000-CT, 4SC-0500-CT, 4SC-0300-CT