Merit Sensor 5000 Series

  • Exempt
  • Merit Sensor

Product Features

  • High pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of open, half closed or closed available
  • Parts supplied in wafers on tape or waffle pack
  • Automotive

Applications

  • Automotive
  • Medical

Description

The 5000 series high pressure MEMS sensing elements from Merit SensorTM is ideal for OEM applications, offering available pressure ranges of between 1,000psi and 10,000psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range of 125mV to 300mv (depending on the pressure range). The 5000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

  • High Pressure MEMS sensing elements
  • Pressure ranges available 1,000psi, 3,000psi, 5,000psi and 10,000psi
  • Absolute pressure type
  • Temperature range −40°C to +150°C
  • Typical full scale output (at 5V excitation) 125mV at 1,000psi, 180mV at 3,000psi, 200mV at 5,000psi and 1,000psi, 175mV at 500psi
  • Impedance of 5kΩ (typical) or 3.5kΩ (optional)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame
  • Bridge options of open, half open or closed
  • AEC-Q100 qualification available upon request

Typical applications for the Merit SensorTM 5000 series include:

  • Industrial
  • Aerospace
  • Automotive
  • Consumer
  • Medical

Please see below the specifications for the Merit SensorTM 5000 series:

Merit Sensor 5000 series Specifications


Specifications

Weight 0.00000 kg
Dimensions 1.60 × 1.90 × 0.90 mm
Additional Features

High pressure MEMS sensing elementSuitable for clean, dry air and non corrosive gasesBridge options of open, half closed or closed availableParts supplied in wafers on tape or waffle pack

Series / Model

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Temperature Range (°C)

Package / Size

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RoHS Compliant Product – Merit

This product is available fully compliant to the RoHS EU directive 2011/65/EU.

Merit Sensor 5000 Series Ordering Info

Below is an example of the part number break down for the 5000 series:

bp Series Part Number Example

Merit Sensor 5000 Series Technical Library

We are pleased to provide you with a range of additional content including product datasheets and application notes for your reference. Please see below for the latest content available:

 

 

DOCUMENTATION
Merit Sensor 5000 series high pressure MEMS sensing elements datasheet
Merit Sensor bridge configuration options application note
Merit Sensor handling and mounting of pressure die application note
Merit Sensor reflow soldering application note
Merit Sensor product selection guide

Merit Sensor 5000 Series

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