Description
The 5000 series high pressure MEMS sensing elements from Merit SensorTM is ideal for OEM applications, offering available pressure ranges of between 1,000psi and 10,000psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range of 125mV to 300mv (depending on the pressure range). The 5000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.
- High Pressure MEMS sensing elements
- Pressure ranges available 1,000psi, 3,000psi, 5,000psi and 10,000psi
- Absolute pressure type
- Operating temperature −40°C to +150°C
- Typical full scale output (at 5V excitation) 125mV at 1,000psi, 180mV at 3,000psi, 200mV at 5,000psi and 1,000psi, 175mV at 500psi
- Impedance of 5kΩ (typical) or 3.5kΩ (optional)
- Suitable for clean, dry air and non-corrosive gases media
- Sawn wafer on tape in metal frame
- Bridge options of open, half open or closed
- AEC-Q100 qualification available upon request
Typical applications for the Merit SensorTM 5000 series include:
- Industrial
- Aerospace
- Automotive
- Consumer
- Medical
Please see below the specifications for the Merit SensorTM 5000 series:
