Description
The 3000 series low pressure MEMS pressure sensing elements from Merit SensorTM is ideal for OEM applications, offering available pressure ranges of between 5psi and 100psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV to 150mV (depending on the pressure range). The 3000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.
- Low pressure MEMS sensing elements
- Pressure ranges available 5psi, 15psi, 30psi, 50psi and 100psi
- Absolute and gauge options available
- Operating temperature −40°C to +150°C
- Typical full scale output (at 5V excitation) 75mV at 5psi, 125mV at 100psi, 150mV at 15psi, 30psi and 100psi
- Impedance of 5kΩ (typical) or 3.5kΩ (optional)
- Suitable for clean, dry air and non-corrosive gases media
- Sawn wafer on tape in metal frame
- Bridge options of open, half open and closed
Typical applications for the Merit SensorTM 3000 series include:
- Industrial
- Calibration devices
- Pressure meters
Please see below the specifications for the Merit SensorTM 3000 series:
