Ultra-Low Pressure MEMS Silicon Piezoresistive Pressure Sensor

The L series silicon MEMS piezoresistive pressure sensor from Merit Sensor^TM is ideal for ultra-low pressure applications, offering pressure ranges from 0.15 to 1psi (1 to 6.89 kPa 10 to 68.95 mbar). The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. Merit Sensor products incorporate a proprietary Sentium® technology, developed to provide an exceptional operating temperature range of -40°C to +150°C while still achieving superior stability. The L Series offers full-scale output ranges from 30mV to 60mv (at 5V excitation, depending on the pressure range) with additional outputs being available upon request.

• Ultra-low pressure MEMS piezoresistive pressure sensor
• Pressure ranges of 0.15psi, 0.3psi & 1psi
• Constraint of Gauge (R)
• Temperature range −40°C to +150°C
• Full scale outputs from 30mV to 60mV (at 5V excitation)
• Impedance of 5kΩ (typical)
• Suitable for clean, dry air and non-corrosive gases media
• Sawn wafer on tape in metal frame (T)
• Bridge options of open or closed
• U.S. Patent Number 7,290,453

Typical applications for the Merit Sensor^TM L series include:

• Air/Non-aggressive gases pressure/differential
• High-performance oil-filled transducers
• High-performance backside packaged modules
• Low-level monitoring
• Clean rooms, Building automation, HVAC, Airflow
• Oil, Gas, Fuel, A/C gases & Water

Merit Sensor Systems, Inc. partners with Rhopoint and it’s customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Please visit https://meritsensor.com/ for more information.