Merit Sensor 5000 Series

Merit Sensor 5000 Series

The 5000 series high pressure MEMS sensing elements from Merit SensorTM is ideal for OEM applications, offering available pressure ranges of between 1,000psi and 10,000psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range of 125mV to 300mv (depending on the pressure range). The 5000 series from Merit SensorTM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

  • High Pressure MEMS sensing elements
  • Pressure ranges available 1,000psi, 3,000psi, 5,000psi and 10,000psi
  • Absolute pressure type
  • Operating temperature −40°C to +150°C
  • Typical full scale output (at 5V excitation) 125mV at 1,000psi, 180mV at 3,000psi, 200mV at 5,000psi and 1,000psi, 175mV at 500psi
  • Impedance of 5kΩ (typical) or 3.5kΩ (optional)
  • Suitable for clean, dry air and non-corrosive gases media
  • Sawn wafer on tape in metal frame
  • Bridge options of open, half open or closed
  • AEC-Q100 qualification available upon request

Typical applications for the Merit SensorTM 5000 series include:

  • Industrial
  • Aerospace
  • Automotive
  • Consumer
  • Medical
  • Please see below the specifications for the Merit SensorTM 5000 series:

    Merit Sensor<sup>TM</sup> 5000 series Specifications
Specifications
Additional Features
  • High pressure MEMS sensing element
  • Suitable for clean, dry air and non corrosive gases
  • Bridge options of open, half closed or closed available
  • Parts supplied in wafers on tape or waffle pack
Impedance
  • 5kΩ typical
  • 3.5kΩ optional
Operating Temperature −40°C to +150°C
Output Typical full scale at 5V excitation:
  • 125mV at 1,000psi
  • 180mV at 3,000psi
  • 200mV at 5.000psi
  • 300mV at 10,000psi
Package/Size Surface-mount
Pressure Range
  • 1,000psi
  • 3,000psi
  • 5,000psi
  • 10,000psi
Pressure Type Absolute

We are pleased to provide you with a range of additional content including product datasheets and application notes for your reference. Please see below for the latest content available:

 

 

DOCUMENTATION
PDF Document Merit Sensor 5000 series high pressure MEMS sensing elements datasheet
PDF Document Merit Sensor bridge configuration options application note
PDF Document Merit Sensor handling and mounting of pressure die application note
PDF Document Merit Sensor reflow soldering application note
PDF Document Merit Sensor product selection guide

Below is an example of the part number break down for the 5000 series:

bp Series Part Number Example

This product is available fully compliant to the RoHS EU directive 2011/65/EU.

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  • Product Code: Merit Sensor 5000 Series
  • SKU: Merit Sensor 5000 Series
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